Turbo Molecular Pump , F-400/3500B , Water cooling , Oil lubrication
KYKY developed the oil lubrication turbo pumps of compact and high-performance with advantages of compact structure, convenient operation, flexible installation, wide application range and stable performance.
Advantages:
This series of pump is good at performance under harsh environmental (high temperature, dust, etc.), stable in performance and with long service life, and simple maintenance and convenient operation as well.
Applications:
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries
Specifications:
| Flange(In) |
DN400 ISO-K |
| Flange(Out) KF |
DN100 |
| Pumping Speed( L/s) |
N2:3500 |
| He:2650 |
| H2:1280 |
| Ar:3200 |
| Compression Ratio |
N2:108 |
| He:103 |
| H2:102 |
| Ar:108 |
| Ultimated Pressure(Pa) |
6×10-6 |
| Max. Continuous Fore-vacuum pressure(Pa) |
100 |
| Max. Fore-vacuum Pressure |
N2:300 |
| Gas Throughout (sccm) |
N2:5500 |
| He:4000 |
| H2:3200 |
| Ar:2100 |
| Rotation Speed ( rpm) |
13500 |
| Run-Up Time(min) |
≤18 |
| Cooling Type,Standard |
Water |
| Cooling Water Consumption ( L/min) |
≥1 |
| Cooling Water Temperature(℃) |
≤25 |
| Power Connection:Voltage (V AC) |
DC24/AC220 |
| Max.Power Consumption (W) |
≤1100 |
| Controller Model |
FD-III,TCDP-III |
| Weight (kgs) |
130 |
KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.
Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients
to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation.
Product Tags:
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