Turbo Molecular Pump ,F-400/3500N , Water Cooling , Oil lubrication , Anti- corrosion
The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are well suited for applications in corrosive environments.
KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.
Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients
to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation.
Advantages:
1. Stable performance and long service life
2. Simple maintenance and convenient operation
3. Availableharsh operating environment (high temperature, dust, strong corrosion, etc.)
Applications:
N-series turbo pumps are mainly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, Low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnaces and other industries.
Specifications:
| Flange(In) |
DN400/ISO-K |
| Flange(Out) KF |
DN100 |
| Pumping Speed( L/s) |
N2:3500 |
| He:2650 |
| H2:1280 |
| Ar:3200 |
| Compression Ratio |
N2:108 |
| He:103 |
| H2:102 |
| Ar:108 |
| Ultimated Pressure(Pa) |
|
| ISO-K:6×10-6 |
| Max. Continuous Fore-vacuum pressure(Pa) |
100 |
| Max. Fore-vacuum Pressure |
N2:350 |
| Gas Throughout (sccm) |
N2:5500 |
| He:4000 |
| H2:3200 |
| Ar:2100 |
| Rotation Speed ( rpm) |
13500 |
| Run-Up Time(min) |
≤18 |
| Cooling Type,Standard |
Water |
| Cooling Water Consumption ( L/min) |
≥1 |
| Cooling Water Temperature(℃) |
≤25 |
| Power Connection:Voltage (V AC) |
220±22 |
| Max.Power Consumption (W) |
≤1100 |
| Controller Model |
TCDP-II /FD-III
with 2.5 metet cable |
Product Tags:
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Oil Lubrication Turbomolecular Pump F-400/3500N Simple Maintenance Images
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